Browsing by Author "Hazart, Jérôme"

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Browsing by Author "Hazart, Jérôme"

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Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry

Foldyna, Martin; De Martino, Antonello; Garcia-Caurel, Enric; Ossikovski, Razvigor; Bertin, François; Hazart, Jérôme; Postava, Kamil; Drevillon, Bernard (Physica status solidi. A, Applications and materials science. 2008, vol. 205, issue 4, p. 806-809.)

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