Browsing Publikační činnost Institutu fyziky / Publications of Institute of Physics (516) by Author "Antoš, Roman"

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516 - Institut fyziky / Institute of Physics
Publikační činnost Institutu fyziky / Publications of Institute of Physics (516)
Browsing Publikační činnost Institutu fyziky / Publications of Institute of Physics (516) by Author

Browsing Publikační činnost Institutu fyziky / Publications of Institute of Physics (516) by Author "Antoš, Roman"

Now showing items 1-3 of 3

Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials

Antoš, Roman; Pištora, Jaromír; Mistrík, Jan; Yamaguchi, Tomuo; Yamaguchi, Shinji; Horie, Masahiro; Višňovský, Štefan; Otani, Yoshichika (Journal of applied physics. 2006, vol. 100, issue 5, 11 p.)
Spectroscopic ellipsometry on lamellar gratings

Antoš, Roman; Ohlídal, Ivan; Mistrík, Jan; Murakami, K.; Yamaguchi, Tomuo; Pištora, Jaromír; Horie, Masahiro; Višňovský, Štefan (Applied surface science. 2005, vol. 244, issues 1-4, p. 225-229.)
Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate

Antoš, Roman; Pištora, Jaromír; Ohlídal, Ivan; Postava, Kamil; Mistrík, Jan; Yamaguchi, Tomuo; Višňovský, Štefan; Horie, Masahiro (Journal of applied physics. 2005, vol. 97, issue 5, 7 p.)

Now showing items 1-3 of 3

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