Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry

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Title: Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry
Author: Foldyna, Martin
De Martino, Antonello
Garcia-Caurel, Enric
Ossikovski, Razvigor
Bertin, François
Hazart, Jérôme
Postava, Kamil
Drevillon, Bernard
Date issue: 2008
Citation: Physica status solidi. A, Applications and materials science. 2008, vol. 205, issue 4, p. 806-809.
URI: http://hdl.handle.net/10084/65087
ISSN: 0031-8965
1521-396X
DOI: 10.1002/pssa.200777808
URI: http://dx.doi.org/10.1002/pssa.200777808
Type: Article
Access rights: Fulltext Request
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