Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry

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Title: Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry
Author: Foldyna, Martin
De Martino, Antonello
Garcia-Caurel, Enric
Ossikovski, Razvigor
Licitra, Christophe
Bertin, François
Postava, Kamil
Drevillon, Bernard
Date issue: 2008
Citation: European physical journal - applied physics. 2008, vol. 42, issue 3, p. 351-359.
URI: http://hdl.handle.net/10084/66072
ISSN: 1286-0042
1286-0050
DOI: 10.1051/epjap:2008089
URI: http://dx.doi.org/10.1051/epjap:2008089
Type: article
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