Zobrazit minimální záznam

dc.contributor.authorFoldyna, Martin
dc.contributor.authorDe Martino, Antonello
dc.contributor.authorGarcia-Caurel, Enric
dc.contributor.authorOssikovski, Razvigor
dc.contributor.authorLicitra, Christophe
dc.contributor.authorBertin, François
dc.contributor.authorPostava, Kamil
dc.contributor.authorDrevillon, Bernard
dc.date.accessioned2008-07-25T12:42:28Z
dc.date.available2008-07-25T12:42:28Z
dc.date.issued2008
dc.identifier.citationEuropean physical journal - applied physics. 2008, vol. 42, issue 3, p. 351-359.en
dc.identifier.issn1286-0042
dc.identifier.issn1286-0050
dc.identifier.urihttp://hdl.handle.net/10084/66072
dc.description.abstractWe characterized two samples consisting of photoresist layers on silicon with square arrays of square holes by spectroscopic ellipsometry (SE) and Mueller matrix polarimetry (MMP). Hole lateral dimensions and depths were determined by fitting either SE data taken in conventional planar geometry or MMP data in general conical diffraction configurations. A method for objective determination of the optimal measurement conditions based on sensitivity and parameter correlations is presented. When applied to MMP, this approach showed that for one of the samples the optimal incidence angle was 45°, much below the widely used 70° value. The robustness of the dimensional characterisation based on MMP is demonstrated by the high stability of the results provided by separated fits of the data taken at different azimuthal angles.en
dc.language.isoenen
dc.publisherEDP Sciencesen
dc.relation.ispartofseriesEuropean physical journal - applied physicsen
dc.relation.urihttp://dx.doi.org/10.1051/epjap:2008089en
dc.subjectgratingsen
dc.subjectpolarimeters and ellipsometersen
dc.subjectpolarimetryen
dc.subjectmetrological applicationsen
dc.subjectoptical frequency synthesizers for precision spectroscopyen
dc.titleCritical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetryen
dc.typearticleen
dc.identifier.locationVe fondu ÚKen
dc.identifier.doi10.1051/epjap:2008089
dc.identifier.wos000257337500025


Soubory tohoto záznamu

SouboryVelikostFormátZobrazit

K tomuto záznamu nejsou připojeny žádné soubory.

Tento záznam se objevuje v následujících kolekcích

Zobrazit minimální záznam