Optical characterization of TiN/SiO2(1000 nm)/Si system by spectroscopic ellipsometry and reflectometry

Author
Date
2001
Type
article
Location
Není ve fondu ÚK
ISSN
0169-4332
Metadata
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Citation source document
Applied Surface Science. 2001, vols. 175-176, p. 270-275.
Available at
http://dx.doi.org/10.1016/S0169-4332(01)00095-2
URI
http://hdl.handle.net/10084/60826
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