Phase retrieval from the spectral interference signal used to measure thickness of SiO2 thin film on silicon wafer

Author

Hlubina, Petr

Ciprian, Dalibor

Luňáček, Jiří

Chlebus, Radek

Date

2007

Type

article

Location

Není ve fondu ÚK

ISSN

0946-2171

1432-0649

Metadata

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Citation source document

Applied Physics B. 2007, vol. 88, no. 3, p. 397-403.

Available at

http://dx.doi.org/10.1007/s00340-007-2709-4

URI

http://hdl.handle.net/10084/63507

Collections

• Publikační činnost VŠB-TUO ve Web of Science / Publications of VŠB-TUO in Web of Science [7798]
• Publikační činnost Institutu fyziky / Publications of Institute of Physics (516) [295]

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