Optical measurements of silicon wafer temperature
Citation source document
Applied Surface Science. 2007, vol. 254, issues 1, p. 416-419.
Available at
http://dx.doi.org/10.1016/j.apsusc.2007.07.086Description
Issue 1 (2007): International Conference on Solid Films and Surfaces : ICSFS 13, San Carlos de Bariloche, Argentina, November 6-10, 2006. Proceeding