Null ellipsometer with phase modulation

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dc.contributor.author Postava, Kamil
dc.contributor.author Maziewski, Andrzej
dc.contributor.author Yamaguchi, Tomuo
dc.contributor.author Ossikovski, Razvigor
dc.contributor.author Višňovský, Štefan
dc.contributor.author Pištora, Jaromír
dc.date.accessioned 2006-10-16T08:49:02Z
dc.date.available 2006-10-16T08:49:02Z
dc.date.issued 2004
dc.identifier.citation Optics express. 2004, vol. 12, issue 24, p. 6040-6045. en
dc.identifier.issn 1094-4087
dc.identifier.uri http://hdl.handle.net/10084/57131
dc.description.abstract A new null ellipsometer is described that uses photoelastic modulator (PEM). The phase modulation adds a good signal-to-noise ratio, high sensitivity, and linearity near null positions to the traditional high-precision nulling system. The ellipsometric angles Δ and ψ are obtained by azimuth measurement of the analyzer and the polarizer–PEM system, for which the first and second harmonics of modulator frequency cross the zeros. We show that the null system is insensitive to ellipsometer misadjustment and component imperfections and modulator calibration is not needed. In addition, a fast ellipsometer mode for fine changes measurement of ellipsometric angles is proposed. en
dc.language.iso en en
dc.publisher Optical Society of America en
dc.relation.ispartofseries Optics express en
dc.relation.uri http://www.opticsinfobase.org/abstract.cfm?URI=oe-12-24-6040 en
dc.rights © 2004 Optical Society of America
dc.rights This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OPEX.12.006040. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
dc.subject instrumentation
dc.subject measurement and metrology
dc.subject ellipsometry and polarimetry
dc.subject physical optics
dc.title Null ellipsometer with phase modulation en
dc.type Article en
dc.identifier.location Není ve fondu ÚK en
dc.identifier.doi 10.1364/OPEX.12.006040
dc.rights.access openAccess
dc.type.version publishedVersion
dc.identifier.wos 000225459700026

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