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dc.contributor.authorPostava, Kamil
dc.contributor.authorMaziewski, Andrzej
dc.contributor.authorYamaguchi, Tomuo
dc.contributor.authorOssikovski, Razvigor
dc.contributor.authorVišňovský, Štefan
dc.contributor.authorPištora, Jaromír
dc.date.accessioned2006-10-16T08:49:02Z
dc.date.available2006-10-16T08:49:02Z
dc.date.issued2004
dc.identifier.citationOptics express. 2004, vol. 12, issue 24, p. 6040-6045.en
dc.identifier.issn1094-4087
dc.identifier.urihttp://hdl.handle.net/10084/57131
dc.description.abstractA new null ellipsometer is described that uses photoelastic modulator (PEM). The phase modulation adds a good signal-to-noise ratio, high sensitivity, and linearity near null positions to the traditional high-precision nulling system. The ellipsometric angles Δ and ψ are obtained by azimuth measurement of the analyzer and the polarizer–PEM system, for which the first and second harmonics of modulator frequency cross the zeros. We show that the null system is insensitive to ellipsometer misadjustment and component imperfections and modulator calibration is not needed. In addition, a fast ellipsometer mode for fine changes measurement of ellipsometric angles is proposed.en
dc.language.isoenen
dc.publisherOptical Society of Americaen
dc.relation.ispartofseriesOptics expressen
dc.relation.urihttp://www.opticsinfobase.org/abstract.cfm?URI=oe-12-24-6040en
dc.rights© 2004 Optical Society of America
dc.rightsThis paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OPEX.12.006040. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
dc.subjectinstrumentation
dc.subjectmeasurement and metrology
dc.subjectellipsometry and polarimetry
dc.subjectphysical optics
dc.titleNull ellipsometer with phase modulationen
dc.typearticleen
dc.identifier.locationNení ve fondu ÚKen
dc.identifier.doi10.1364/OPEX.12.006040
dc.rights.accessopenAccess
dc.type.versionpublishedVersion
dc.identifier.wos000225459700026


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