Phase retrieval from the spectral interference signal used to measure thickness of SiO2 thin film on silicon wafer

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Title: Phase retrieval from the spectral interference signal used to measure thickness of SiO2 thin film on silicon wafer
Author: Hlubina, Petr
Ciprian, Dalibor
Luňáček, Jiří
Chlebus, Radek
Date issue: 2007
Citation: Applied physics. B, Lasers and optics. 2007, vol. 88, no. 3, p. 397-403.
URI: http://hdl.handle.net/10084/63507
ISSN: 0946-2171
1432-0649
DOI: 10.1007/s00340-007-2709-4
URI: http://dx.doi.org/10.1007/s00340-007-2709-4
Type: article
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