Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry

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dc.contributor.author Foldyna, Martin
dc.contributor.author De Martino, Antonello
dc.contributor.author Garcia-Caurel, Enric
dc.contributor.author Ossikovski, Razvigor
dc.contributor.author Bertin, François
dc.contributor.author Hazart, Jérôme
dc.contributor.author Postava, Kamil
dc.contributor.author Drevillon, Bernard
dc.date.accessioned 2008-06-03T10:01:23Z
dc.date.available 2008-06-03T10:01:23Z
dc.date.issued 2008
dc.identifier.citation Physica status solidi. A, Applications and materials science. 2008, vol. 205, issue 4, p. 806-809. en
dc.identifier.issn 0031-8965
dc.identifier.issn 1521-396X
dc.identifier.uri http://hdl.handle.net/10084/65087
dc.description.abstract In this work we characterized two bidimensional gratings consisting each of a square array of square holes etched in a photoresist layer deposited on silicon. Data were taken on both samples with a spectroscopic UV-VIS ellipsometer (SE) operated at 70° incidence and zero azimuth (with the incidence plane parallel to the lines of holes) and a VIS Mueller matrix polarimeter (MMP) at various incidence and azimuthal angles. The robustness of the parameters derived from the MMP data was evaluated from the stability of the values provided by regression the spectra taken at different angles. The optimal measurement geometries, featuring high sensitivity and low correlation of the fitting parameters, were determined theoretically, and validated experimentally with the sample featuring wider holes (500 × 500 nm), for which 45° incidence provided better results than the usual 70° value. en
dc.language.iso en en
dc.publisher Wiley-VCH en
dc.relation.ispartofseries Physica status solidi. A, Applications and materials science en
dc.relation.uri http://dx.doi.org/10.1002/pssa.200777808 en
dc.title Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry en
dc.type article en
dc.identifier.location Není ve fondu ÚK en
dc.identifier.doi 10.1002/pssa.200777808
dc.identifier.wos 000255702600021

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