Spectral interferometry and reflectometry used to measure thin films

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Title: Spectral interferometry and reflectometry used to measure thin films
Author: Hlubina, Petr
Luňáček, Jiří
Ciprian, Dalibor
Chlebus, Radek
Date issue: 2008
Citation: Applied physics, B. Lasers and Optics. 2008, vol. 92, no. 2, p. 203-207.
URI: http://hdl.handle.net/10084/66348
ISSN: 0946-2171
1432-0649
DOI: 10.1007/s00340-008-3093-4
URI: http://dx.doi.org/10.1007/s00340-008-3093-4
Type: Article
Document version: submittedVersion
Access rights: openAccess Fulltext Request
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