Browsing by Author "Bertin, François"

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Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry

Foldyna, Martin; De Martino, Antonello; Garcia-Caurel, Enric; Ossikovski, Razvigor; Licitra, Christophe; Bertin, François; Postava, Kamil; Drevillon, Bernard (European Physical Journal Applied Physics. 2008, vol. 42, issue 3, p. 351-359.)
Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry

Foldyna, Martin; De Martino, Antonello; Garcia-Caurel, Enric; Ossikovski, Razvigor; Bertin, François; Hazart, Jérôme; Postava, Kamil; Drevillon, Bernard (physica status solidi (a). 2008, vol. 205, issue 4, p. 806-809.)