Prohlížení dle autora "Hazart, Jérôme"
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Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry
Foldyna, Martin; De Martino, Antonello; Garcia-Caurel, Enric; Ossikovski, Razvigor; Bertin, François; Hazart, Jérôme; Postava, Kamil; Drevillon, Bernard (physica status solidi (a). 2008, vol. 205, issue 4, p. 806-809.)