Browsing by Author "Licitra, Christophe"
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Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry
Foldyna, Martin; De Martino, Antonello; Garcia-Caurel, Enric; Ossikovski, Razvigor; Licitra, Christophe; Bertin, François; Postava, Kamil; Drevillon, Bernard (European Physical Journal Applied Physics. 2008, vol. 42, issue 3, p. 351-359.)