Browsing by Author "Ohlídal, Ivan"

Now showing items 1-3 of 3

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

Vodák, Jiří; Nečas, David; Ohlídal, Miloslav; Ohlídal, Ivan (Measurement Science and Technology. 2017, vol. 28, issue 2, art. no. 025205.)
Spectroscopic ellipsometry on lamellar gratings

Antoš, Roman; Ohlídal, Ivan; Mistrík, Jan; Murakami, K.; Yamaguchi, Tomuo; Pištora, Jaromír; Horie, Masahiro; Višňovský, Štefan (Applied Surface Science. 2005, vol. 244, issues 1-4, p. 225-229.)
Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate

Antoš, Roman; Pištora, Jaromír; Ohlídal, Ivan; Postava, Kamil; Mistrík, Jan; Yamaguchi, Tomuo; Višňovský, Štefan; Horie, Masahiro (Journal of Applied Physics. 2005, vol. 97, issue 5, 7 p.)