Browsing by Author "Pekárek, Jan"

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Parylene micropillars coated with thermally grown SiO2

Liu, Xiaocheng; Fecko, Peter; Fohlerová, Zdenka; Karásek, Tomáš; Pekárek, Jan; Neužil, Pavel (Journal of Vacuum Science & Technology B. 2020, vol. 38, issue 6, art. no. 063001.)