Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement

Hlubina, Petr; Ciprian, Dalibor; Luňáček, Jiří

dc.contributor.author	Hlubina, Petr
dc.contributor.author	Ciprian, Dalibor
dc.contributor.author	Luňáček, Jiří
dc.date.accessioned	2007-09-19T07:53:55Z
dc.date.available	2007-09-19T07:53:55Z
dc.date.issued	2007
dc.identifier.citation	Optik - International Journal for Light and Electron Optics. 2007, vol. 118, issue 7, p. 319-324.	en
dc.identifier.issn	0030-4026
dc.identifier.uri	http://hdl.handle.net/10084/62867
dc.language.iso	en	en
dc.publisher	Urban & Fischer	en
dc.relation.ispartofseries	Optik - International Journal for Light and Electron Optics	en
dc.relation.uri	http://dx.doi.org/10.1016/j.ijleo.2006.04.002	en
dc.subject	white light	en
dc.subject	spectral interferometry	en
dc.subject	thin-film structure	en
dc.subject	nonlinear phase function	en
dc.subject	distance	en
dc.title	Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement	en
dc.type	article	en
dc.identifier.location	Ve fondu ÚK	en
dc.description.abstract-en	A spectral-domain white-light interferometric technique is used for measuring distances in a Michelson interferometer with a mirror represented by a thin-film structure (TFS) on a substrate. A fibre-optic spectrometer is employed for recording spectral interferograms that include wide wavelength range effects of dispersion in a cube beam splitter and multiple reflection within the TFS. Knowing the effective thickness of the beam splitter, its dispersion and parameters of the TFS and substrate, the positions of the second interferometer mirror are determined precisely by a least-squares fitting of the theoretical spectral interferograms to the recorded ones. We apply the technique to the beam splitter made of BK7 optical glass and to a uniform SiO2 thin film on a silicon wafer. We compare the results of the processing that include and do not include the effect of the TFS.	en
dc.identifier.doi	10.1016/j.ijleo.2006.04.002
dc.identifier.wos	000247999600003

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