Prohlížení dle autora "Horie, Masahiro"

Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials

Antoš, Roman; Pištora, Jaromír; Mistrík, Jan; Yamaguchi, Tomuo; Yamaguchi, Shinji; Horie, Masahiro; Višňovský, Štefan; Otani, Yoshichika (Journal of Applied Physics. 2006, vol. 100, issue 5, 11 p.)

Effects influencing the spectral ellipsometry angles of 2D periodical structures

Pištora, Jaromír; Vlček, Jaroslav; Yamaguchi, Tomuo; Postava, Kamil; Horie, Masahiro; Aoyama, Mitsuru (Sborník vědeckých prací Vysoké školy báňské - Technické univerzity Ostrava. Řada elektrotechnická. 2003, roč. 6, č. 1, s. 180-192 : il.)

Estimation of the dielectric properties of low-k materials using optical spectroscopy

Postava, Kamil; Yamaguchi, Tomuo; Horie, Masahiro (Applied Physics Letters. 2001, vol. 79, issue 14, p. 2231-2233.)

Experimental spectral ellipsometry of 1D deep lamellar gratings

Pištora, Jaromír; Yamaguchi, Tomuo; Horie, Masahiro; Aoyama, Mitsuru (Sborník vědeckých prací Vysoké školy báňské - Technické univerzity Ostrava. Řada hornicko-geologická. 2003, roč. 49, č. 1, s. 59-67 : il.)

Spectral ellipsometry of binary optic gratings

Pištora, Jaromír; Yamaguchi, Tomuo; Vlček, Jaroslav; Mistrík, Jan; Horie, Masahiro; Šmatko, Vasilij; Kováčová, Eva; Postava, Kamil; Aoyama, Mitsuru (Optica Applicata. 2003, vol. 33, no. 2-3, p. 251-262.)

Spectroscopic ellipsometry of epitaxial ZnO layer on sapphire substrate

Postava, Kamil; Sueki, H.; Aoyama, Mitsuru; Yamaguchi, Tomuo; Ino, Ch.; Igasaki, Y.; Horie, Masahiro (Journal of Applied Physics. 2000, vol. 87, issue 11, p. 7820-7824.)

Spectroscopic ellipsometry on lamellar gratings

Antoš, Roman; Ohlídal, Ivan; Mistrík, Jan; Murakami, K.; Yamaguchi, Tomuo; Pištora, Jaromír; Horie, Masahiro; Višňovský, Štefan (Applied Surface Science. 2005, vol. 244, issues 1-4, p. 225-229.)

Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate

Antoš, Roman; Pištora, Jaromír; Ohlídal, Ivan; Postava, Kamil; Mistrík, Jan; Yamaguchi, Tomuo; Višňovský, Štefan; Horie, Masahiro (Journal of Applied Physics. 2005, vol. 97, issue 5, 7 p.)