Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials

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Title: Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials
Author: Antoš, Roman
Pištora, Jaromír
Mistrík, Jan
Yamaguchi, Tomuo
Yamaguchi, Shinji
Horie, Masahiro
Višňovský, Štefan
Otani, Yoshichika
Date issue: 2006
Citation: Journal of applied physics. 2006, vol. 100, issue 5, 11 p.
URI: http://hdl.handle.net/10084/57133
ISSN: 0021-8979
1089-7550
DOI: 10.1063/1.2337256
URI: http://dx.doi.org/10.1063/1.2337256
Type: article
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