Prohlížení dle autora "Yamaguchi, Shinji"
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Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials
Antoš, Roman; Pištora, Jaromír; Mistrík, Jan; Yamaguchi, Tomuo; Yamaguchi, Shinji; Horie, Masahiro; Višňovský, Štefan; Otani, Yoshichika (Journal of Applied Physics. 2006, vol. 100, issue 5, 11 p.)