Effect of oxygen defects on microstructure, optical and vibrational properties of ScN films deposited on MgO substrate from experiment and first principles

Abstract

We report on the effects of oxygen impurities on the microstructure, surface morphology, optical absorption, and vibrational properties of scandium nitride thin films deposited onto magnesium oxide substrate by reactive magnetron sputtering and under ultrahigh vacuum conditions. Two distinct deposition temperatures of 700 °C and 800 °C were applied to adjust the level of oxygen contamination. The ScN/MgO(0 0 1) thin films have been characterized by various spectroscopic methods, including X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, Raman spectroscopy, and optical microscopy. The ScN films deposited at the lower temperature of the MgO substrate show higher content of defects, stronger disorientation, a larger concentration of twin domains, and suppressed adatom mobility as compared to layers deposited at the higher temperature. An increase by 2% in the amount of accommodated oxygen results in the increase in the direct energy gap of the ScN films by about 0.13 eV, which follows from the increased concentration of the n-type charge carriers incorporated by oxygen impurities. The observed increase in the absorption edge, i.e., enlargement of the optical band gap can be accounted for the Burstein–Moss effect. Experimental Raman spectra reveal coupling between longitudinal optic phonons and electronic states, which can be described by the Fano-type function with the asymmetry parameter increasing with increased content of oxygen defects. The ab initio Raman spectra of ScN with concentrations of oxygen impurities corresponding to the respective experimental values, obtained within density functional theory, demonstrate that incorporated impurities affect significantly the phonon dynamics via modified force constants, including those at atoms beyond the nearest neighbors of defects. The simulated Raman spectra reflect major features of the experimentally determined spectral patterns enabling better insight into the origin of changes experienced by the oxygen-modified ScN/MgO(0 0 1) films.