| dc.contributor.author | Halagačka, Lukáš | |
| dc.contributor.author | Postava, Kamil | |
| dc.contributor.author | Foldyna, Martin | |
| dc.contributor.author | Pištora, Jaromír | |
| dc.date.accessioned | 2008-06-03T08:38:33Z | |
| dc.date.available | 2008-06-03T08:38:33Z | |
| dc.date.issued | 2008 | |
| dc.identifier.citation | physica status solidi (a). 2008, vol. 205, issue 4, p. 752-755. | en |
| dc.identifier.issn | 1862-6300 | |
| dc.identifier.issn | 1862-6319 | |
| dc.identifier.uri | http://hdl.handle.net/10084/65086 | |
| dc.description.abstract | A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection. | en |
| dc.language.iso | en | en |
| dc.publisher | Wiley-VCH | en |
| dc.relation.ispartofseries | physica status solidi (a) | en |
| dc.relation.uri | http://dx.doi.org/10.1002/pssa.200777823 | en |
| dc.title | Precise phase-modulation generalized ellipsometry of anisotropic samples | en |
| dc.type | article | en |
| dc.identifier.location | Není ve fondu ÚK | en |
| dc.identifier.doi | 10.1002/pssa.200777823 | |
| dc.identifier.wos | 000255702600011 | |