Study of Phase Composition and Optical Properties of Nickel Silicides Prepared by Magnetron Sputtering

Abstract

This bachelor thesis deals with the preparation of various phases of nickel silicides and their characterization. Nickel silicides are primarily used as ohmic contacts on Si or SiC, and understanding their properties can assist in the design of devices where these contacts are utilized. The nickel silicides were characterized using scanning electron microscopy, EDX, EBSD, and spectroscopic ellipsometry. Electrical parameters were obtained through the modeling of optical spectra acquired from the ellipsometry measurements. The information obtained can be used in further studies of ohmic contact formation on SiC.