Regulace vstupního tlaku pomocí řízení otáček vakuové pumpy

Abstract

The bachelor thesis is focused on inlet pressure regulation of vacuum pump controlled by speed of motor using variable frequency drive. The main goal is to created regulation system for vacuum pressure in the chamber. The system is identified with using theoretical knowledge earned during studies. In the end, the regulated system is created, the measurements are done, as well as the comparison of regulated and unregulated system.