Depolarizace ve spektroskopické elipsometrii

Abstract

Spectroscopic ellipsometry is method widely used in research and industry for optical characterization of various systems, such as layered materials, metamaterials, biological samples or solutions. Depolarization effects can cause problems with data measurement a therefore it is necessary to know how to detect them and preferably how to remove them. In this work is the spectroscopic ellipsometer described by Mueller matrix calculus and it is shown, how the depolarization can be detected through the phase modulation. Error minimalization is done by zone averaging.