Optical characterization of TiN/SiO2(1000 nm)/Si system by spectroscopic ellipsometry and reflectometry
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Publisher
North-Holland
Location
Není ve fondu ÚK
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Abstract
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Subject(s)
TiN, optical functions, spectroscopic ellipsometry, reflectivity
Citation
Applied Surface Science. 2001, vols. 175-176, p. 270-275.