Spektroskopie SiC monokrystalických substrátů

Abstract

Silicon carbide (SiC) has many advantageous properties which predetermines it to wide variety of applications. It is very hard material (second after diamond), which is favorable for mechanical applications. SiC has also interesting semiconductor and electro-optics properties, mainly its wide bandgap and toughness against high temperatures, so it is increasingly used replacing silicon in power electronics. This thesis summarizes main properties of SiC mainly related to applications in microelectronics. The model for processing the data of ellipsometric spectra of Mueller matrices of SiC crystal is proposed and tested. The spectra of permittivity tensor which describe anisotropic optical behavior of SiC are parametrised and determined.