Řízení a vizualizace zařízení pro leptání křemíkových trubic

Abstract

The diploma thesis deals with control and visualization of equipment for etching of silicon tubes. At the beginning, the reader will be introduced to the Vision 1040 PLC and program VisiLogic 9.8.31 for creating control algorithms. It deals with both the design of the device and the description of its function. The output of the thesis is to create a HMI control and visualization algorithm. At the end, verification of the required function of the device and debugging of its control algorithm is performed.