Mueller matrix ellipsometry of special samples

Abstract

The bachelor thesis deals with use of Mueller matrix Ellipsometry for characterization of special samples. It involves experimental measurement using RC2 Woollam ellipsometer and subsequental data analysis using CompleteEase software. Three types of samples are analyzed in this thesis, Au/Cr multilayer on a glass substrate, Sn thing layers 10, 20, 50 and 110 nm thick on a glass substrate and nonlinear BBO crystal. To characterize measured samples special techniques of Mueller matrix Ellipsometry had to be understood, like measurement using glass-side illumination, simultaneous t of several dierent data sets and measurement and modeling of anisotropic samples. As a result of this thesis, the optical models characterizing samples` behaviour were constructed and the dielectric functions of Au and Sn were described.