Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film
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Date issued
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Society of America
Location
Není ve fondu ÚK
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Abstract
Description
Subject(s)
measurement, instrumentation, and metrology, interferometry, phase measurement, optics at surfaces, thin films
Citation
Optics Express. 2006, vol. 14, issue 17, p. 7678-7685.