Simulace elektromagnetického pole budícího jha elektronového mikroskopu

Abstract

This dissertation focuses on a simulation of an elctromagnetic field of an electron microscope lens type. The first portion is dedicated to a theoretical analysis, where the basic laws, equations and quantities for an electromagnetic pole are explained. The following portion is focused on the principle of an electron microscope and electromagnetic lenses. In the practical portion, the simulation of an electromagnetic field of a fabricated lens is summarized, which was proposed according to information from available luterature. The simulation will be carried out in the ANSYS program at 12.1, where we will measure and draw the intensity of the magnetic field and density of the magnetic flow. The conclusion includes an evaluation of the findings and the measured results attained on the basis of the experiment.