Magnetronové naprašování tenkých vrstev

Abstract

This bachelor thesis deals with magnetron sputtering deposition of silver and zinc oxide thin films. The effect of deposition conditions is studied on properties of deposited films. A topography and roughness parameters were determined using atomic force microscopy. X-ray diffraction analysis served for determination of phase composition and crystallinity of prepared films. Spectroscopic ellipsometry was employed to find out the thickness of deposited layers and to specify their optical functions. Overall results are presented after the theoretical basis, which comprises methods of thin films deposition and basic description and principles of experimental setup.