Optical spectroscopy of periodic grating structures

Abstract

This thesis provides in-depth analysis of diffraction measurement and modelling possibilities of blazed gratings and non-contact determination of their profile. It showcases automation script written in SAX Basic programming language. This script was used to accelerate the diffraction measurement and improve the quality of measured diffraction efficiency spectra. The study also explores possibility of using Fraunhofer approximation to model the diffraction behaviour and infer the profile of the grating parametrized by the proposed function from fitting this model to the measured efficiency spectra.