Femtosecond laser processing of membranes for sensor devices on different bulk materials
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Vysoká škola báňská - Technická univerzita Ostrava
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AlGaN/GaN HEMT, diaphragms, laser ablation, LIPSS, SiC MEMS, slot waveguide
Citation
Advances in electrical and electronic engineering. 2017, vol. 15, no. 3, p. 561-568 : ill.