Simulace elektrostatického pole elektronového zdroje elektronového mikroskopu

Abstract

Electron microscopy has lately become an integral part in many scientific fields, which helps to a variety of new discoveries. Individual microscopy is constantly being developed and the limits that had previously seemed as unattainable, are being overcome.

The subject of this thesis is the simulation of the electrostatic field of the electron source of the electron microscope. The electron source, whose electrostatic field will be simulated, comes from the simulated electron microscope operated in the electron microscopy lab at the VŠB - TUO. Specifically, the scanning elektron microscope model Philips 515.

The work also discusses the development of electron microscopy and it analyzes the types of electron resources that can be used by modern electron microscopy. In the practical part, an electrostatic field and potential distribution of a model,which was obtained by measuring of exempted Wehnelt roller from the electron microscope Philips 515, are simulated.