Femtosecond laser processing of membranes for sensor devices on different bulk materials

dc.contributor.author	Zehetner, Johann
dc.contributor.author	Vanko, Gabriel
dc.contributor.author	Dzuba, Jaroslav
dc.contributor.author	Lalinský, Tibor
dc.date.accessioned	2017-12-01T10:44:44Z
dc.date.available	2017-12-01T10:44:44Z
dc.date.issued	2017
dc.identifier.citation	Advances in electrical and electronic engineering. 2017, vol. 15, no. 3, p. 561-568 : ill.	cs
dc.identifier.issn	1336-1376
dc.identifier.issn	1804-3119
dc.identifier.uri	http://hdl.handle.net/10084/122135
dc.format.extent	685602 bytes
dc.format.mimetype	application/pdf
dc.language	Neuvedeno	cs
dc.language.iso	en	cs
dc.publisher	Vysoká škola báňská - Technická univerzita Ostrava	cs
dc.relation.ispartofseries	Advances in electrical and electronic engineering	cs
dc.relation.uri	http://dx.doi.org/10.15598/aeee.v15i3.2033
dc.rights	© Vysoká škola báňská - Technická univerzita Ostrava
dc.rights	© Vysoká škola báňská - Technická univerzita Ostrava
dc.rights	Attribution 4.0 International	*
dc.rights.uri	http://creativecommons.org/licenses/by/4.0/	*
dc.subject	AlGaN/GaN HEMT	cs
dc.subject	diaphragms	cs
dc.subject	laser ablation	cs
dc.subject	LIPSS	cs
dc.subject	SiC MEMS	cs
dc.subject	slot waveguide	cs
dc.title	Femtosecond laser processing of membranes for sensor devices on different bulk materials	cs
dc.type	article	cs
dc.identifier.doi	10.15598/aeee.v15i3.2033
dc.rights.access	openAccess
dc.type.version	publishedVersion
dc.type.status	Peer-reviewed