Optical measurements of silicon wafer temperature
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Date issued
Journal Title
Journal ISSN
Volume Title
Publisher
North-Holland
Location
Není ve fondu ÚK
Signature
Abstract
Description
Issue 1 (2007): International Conference on Solid Films and Surfaces : ICSFS 13, San Carlos de Bariloche, Argentina, November 6-10, 2006. Proceeding
Subject(s)
non-contact temperature measurement, silicon wafer, polarized reflectivity, ellipsometry
Citation
Applied Surface Science. 2007, vol. 254, issues 1, p. 416-419.