Characterization of organic low-dielectric-constant materials using optical spectroscopy

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Publisher

Optical Society of America

Location

Není ve fondu ÚK

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Abstract

Description

Subject(s)

materials, organic materials, Spectroscopy, thin films, optical properties, physical optics, ellipsometry and polarimetry

Citation

Optics Express. 2001, vol. 9, issue 3, p. 141-151.