Characterization of organic low-dielectric-constant materials using optical spectroscopy

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dc.contributor.authorPostava, Kamil
dc.contributor.authorYamaguchi, Tomuo
dc.contributor.authorNakano, T.
dc.date.accessioned2007-07-02T09:25:28Z
dc.date.available2007-07-02T09:25:28Z
dc.date.issued2001
dc.description.abstract-enThe dielectric function spectra of low dielectric constant (low-k) materials have been determined using high-precision four-zone null spectroscopic ellipsometry, near-normal incidence reflection spectrometry and Fourier transform infrared transmission spectroscopy. The optical functions over a wide spectral range from 0.03 to 5.4 eV (230 nm to 40.5 µm wavelength region) have been evaluated for representative low-k materials used in the semiconductor industry for interlayer dielectrics: (1) FLARE -- organic spin-on polymer, and (2) HOSP -- spin-on hybrid organic-siloxane polymer from the Honeywell Electronic Materials Company.en
dc.format.extent333159 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationOptics Express. 2001, vol. 9, issue 3, p. 141-151.en
dc.identifier.doi10.1364/OE.9.000141
dc.identifier.issn1094-4087
dc.identifier.locationNení ve fondu ÚKen
dc.identifier.urihttp://hdl.handle.net/10084/60829
dc.identifier.wos000170203300004
dc.language.isoenen
dc.publisherOptical Society of Americaen
dc.relation.ispartofseriesOptics Expressen
dc.relation.urihttps://doi.org/10.1364/OE.9.000141
dc.rightsThis paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OE.9.000141. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
dc.rights© 2001 Optical Society of America
dc.rights.accessopenAccess
dc.subjectmaterialsen
dc.subjectorganic materialsen
dc.subjectSpectroscopyen
dc.subjectthin filmsen
dc.subjectoptical propertiesen
dc.subjectphysical opticsen
dc.subjectellipsometry and polarimetryen
dc.titleCharacterization of organic low-dielectric-constant materials using optical spectroscopyen
dc.typearticleen
dc.type.versionpublishedVersion

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