Thickness monitoring of optical filters for DWDM applications

Abstract

A method for thickness monitoring and turning-point prediction during deposition of narrow band pass optical filters (NBPF) for dense-wavelength-division-multiplexing (DWDM) applications is proposed. The method is based on a recurrent approach, with relative transmittance .tting, and includes partial coherence and monochromator bandpass e.ects. We show that the partial coherence e.ects in thin .lm structures are signi.cant and can not be neglected. The proposed method is applicable for precise thickness monitoring and deposition control of any complex multilayer coating.