Spectral interferometry and reflectometry used for characterization of a multilayer mirror

Abstract

A white-light spectral interferometric technique is used to retrieve a relative spectral phase and group delay of a multilayer mirror from the spectral interferograms recorded in a dispersive Michelson interferometer. The phase retrieval is based on the use of a windowed Fourier transform in the wavelength domain, and characterization of the multilayer mirror is completed by a three-step measurement of the reflectance spectrum of the mirror in the same interferometer.