Aditivní výroba mikrosenzorů: Vývoj, optimalizace konstrukce a postup výroby

Abstract

The bachelor thesis deals with the development of microsensors using additive technologies. In the introduction, available fabrication methods are analyzed with emphasis on their accuracy, resolution and suitability for microsensor applications. Based on this analysis, two technologies - photolithography and inkjet printing - are selected for the design and implementation of test structures. Both methods are experimentally verified and the results are compared in terms of design quality and electrical properties. The measurement results are used to evaluate the suitability of the technologies for the fabrication of microsensors and to suggest optimizations in future developments. The entire design and manufacturing process is described and documented in detail in the practical part of the thesis.