Zlepšení funkčních parametrů turbomolekulární vývěvy

Abstract

This thesis deals with the potential improvement of functional parameters within the turbo-molecular pump. Such parameters involve vibrations that are being transmitted, as well as the pump's magnetic field into the system. The theoretical part describes the main principle of such turbo-molecular pump, its vibration and magnetic field's output onto the customers' systems. It also focuses on the suggestions of possible improvement in these given parameters. In the practical part, these suggestions are put into practice. It also looks closely at the testing systems' production and their functionality reinforcement. In the end, the overall evaluation of these proposed and introduced actions is carried out thoroughly.