ZnO nanostructures prepared by RF sputtering
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Flickyngerová, S.
Tvarožek, V.
Novotný, I.
Šatka, A.
Šutta, P.
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Žilinská univerzita v Žiline. Elektrotechnická fakulta
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Abstract
ZnO is shortly reviewed as significant material for nanotechnology. Sputtered ZnO thin films showed colummar
polycrystalline structure with preffered orientation in <002> direction, resistivity ~ 1 Wcm and optical bandgap Eg = 3,33 eV.
Nanoclusters of Au and ZnO were formed by use of RF sputtering.
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Advances in electrical and electronic engineering. 2006, vol. 5, no. 3, p. 330-333.